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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Conference Papers(학술회의논문)

고밀도 Helicon Plasma를 이용한 저유전율의 SiOF박막 증착 연구

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김정형 / 서상훈 / 윤석민 / 장홍영researcher
Publisher
한국진공학회
Issue Date
1995
Language
KOR
Citation

한국진공학회 제9회 학술발표회

URI
http://hdl.handle.net/10203/122466
Appears in Collection
PH-Conference Papers(학술회의논문)
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