Pre-treatment effect on aluminum thin films deposition from CVD using dimethylethylamine alane
- Publisher
- MRS
- Issue Date
- 1998-04-13
- Language
- English
- Citation
Proceedings of the 1998 MRS Spring Symposium, pp.351 - 356
- ISSN
- 0272-9172
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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