Pre-treatment effect on aluminum thin films deposition from CVD using dimethylethylamine alane
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jang, Tae Woong | ko |
| dc.contributor.author | Rhee, Hwa Sung | ko |
| dc.contributor.author | Ahn, Byung Tae | ko |
| dc.date.accessioned | 2013-03-15T08:51:18Z | - |
| dc.date.available | 2013-03-15T08:51:18Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-04-13 | - |
| dc.identifier.citation | Proceedings of the 1998 MRS Spring Symposium, pp.351 - 356 | - |
| dc.identifier.issn | 0272-9172 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/118006 | - |
| dc.language | English | - |
| dc.publisher | MRS | - |
| dc.title | Pre-treatment effect on aluminum thin films deposition from CVD using dimethylethylamine alane | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000077430000059 | - |
| dc.identifier.scopusid | 2-s2.0-0032288772 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 351 | - |
| dc.citation.endingpage | 356 | - |
| dc.citation.publicationname | Proceedings of the 1998 MRS Spring Symposium | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | San Francisco, CA, USA | - |
| dc.contributor.localauthor | Ahn, Byung Tae | - |
| dc.contributor.nonIdAuthor | Jang, Tae Woong | - |
| dc.contributor.nonIdAuthor | Rhee, Hwa Sung | - |
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