Viscous energy dissipation in laterally oscillating planar microstructures: a theoretical and experimental study

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Issue Date
1993-02-07
Language
ENG
Citation

IEEE Micro Electro Mechanical Systems, pp.93 - 98

URI
http://hdl.handle.net/10203/105015
Appears in Collection
BiS-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
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