DC Field | Value | Language |
---|---|---|
dc.contributor.author | You, S. J. | ko |
dc.contributor.author | Park, G. Y. | ko |
dc.contributor.author | Kwon, J. H. | ko |
dc.contributor.author | Kim, J. H. | ko |
dc.contributor.author | Chang, Hong-Young | ko |
dc.contributor.author | Lee, J. K. | ko |
dc.contributor.author | Seong, D. J. | ko |
dc.contributor.author | Shin, Y. H. | ko |
dc.date.accessioned | 2013-03-11T16:19:58Z | - |
dc.date.available | 2013-03-11T16:19:58Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2010-03 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v.96, no.10 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10203/99583 | - |
dc.description.abstract | The evolution of electron temperature in a low pressure magnetized capacitive discharge was investigated under the collisionless electron heating regime. The results showed that while the electron temperature increases monotonously with the magnetic field in previous study [Turner et al., Phys. Rev. Lett. 76, 2069(1996)], the electron temperature in our experiment exhibited nonmonotonic evolution behavior with the magnetic field. This nonmonotonic evolution of the electron temperature with the magnetic field was shown to be a combined effect of suppressing electron resonance heating and enhancing collisional heating while increasing the magnetic field. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3309589] | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | GAS-DISCHARGES | - |
dc.subject | RF DISCHARGE | - |
dc.subject | FIELD | - |
dc.title | Evolution of electron temperature in low pressure magnetized capacitive plasma | - |
dc.type | Article | - |
dc.identifier.wosid | 000275588000022 | - |
dc.identifier.scopusid | 2-s2.0-77949726564 | - |
dc.type.rims | ART | - |
dc.citation.volume | 96 | - |
dc.citation.issue | 10 | - |
dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
dc.identifier.doi | 10.1063/1.3309589 | - |
dc.contributor.localauthor | Chang, Hong-Young | - |
dc.contributor.nonIdAuthor | You, S. J. | - |
dc.contributor.nonIdAuthor | Park, G. Y. | - |
dc.contributor.nonIdAuthor | Kwon, J. H. | - |
dc.contributor.nonIdAuthor | Kim, J. H. | - |
dc.contributor.nonIdAuthor | Lee, J. K. | - |
dc.contributor.nonIdAuthor | Seong, D. J. | - |
dc.contributor.nonIdAuthor | Shin, Y. H. | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | GAS-DISCHARGES | - |
dc.subject.keywordPlus | RF DISCHARGE | - |
dc.subject.keywordPlus | FIELD | - |
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