Anomalous evolution of Ar metastable density with electron density in high density Ar discharge

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Recently, an anomalous evolution of argon metastable density with plasma discharge power (electron density) was reported [A. M. Daltrini, S. A. Moshkalev, T. J. Morgan, R. B. Piejak, and W. G. Graham, Appl. Phys. Lett. 92, 061504 (2008)]. Although the importance of the metastable atom and its density has been reported in a lot of literature, however, a basic physics behind the anomalous evolution of metastable density has not been clearly understood yet. In this study, we investigated a simple global model to elucidate the underlying physics of the anomalous evolution of argon metastable density with the electron density. On the basis of the proposed simple model, we reproduced the anomalous evolution of the metastable density and disclosed the detailed physics for the anomalous result. Drastic changes of dominant mechanisms for the population and depopulation processes of Ar metastable atoms with electron density, which take place even in relatively low electron density regime, is the clue to understand the result. (C) 2011 American Institute of Physics. [doi:10.1063/1.3640518]
Publisher
AMER INST PHYSICS
Issue Date
2011-10
Language
English
Article Type
Article
Keywords

INDUCTIVELY-COUPLED PLASMAS; EXCITED ARGON ATOMS; RF REFERENCE CELL; GLOW-DISCHARGE; ICP DISCHARGE; RADIOFREQUENCY; MODEL; STATE; SPECTROSCOPY; SIMULATIONS

Citation

PHYSICS OF PLASMAS, v.18, no.10

ISSN
1070-664X
URI
http://hdl.handle.net/10203/99574
Appears in Collection
PH-Journal Papers(저널논문)
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