Role of transverse magnetic field in the capacitive discharge

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dc.contributor.authorYou, SJko
dc.contributor.authorHai, TTko
dc.contributor.authorPark, Mko
dc.contributor.authorKim, DWko
dc.contributor.authorKim, JHko
dc.contributor.authorSeong, DJko
dc.contributor.authorShin, YHko
dc.contributor.authorLee, SHko
dc.contributor.authorPark, GYko
dc.contributor.authorLee, JKko
dc.contributor.authorChang, Hong-Youngko
dc.date.accessioned2013-03-11T16:13:16Z-
dc.date.available2013-03-11T16:13:16Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2011-08-
dc.identifier.citationTHIN SOLID FILMS, v.519, pp.6981 - 6989-
dc.identifier.issn0040-6090-
dc.identifier.urihttp://hdl.handle.net/10203/99570-
dc.description.abstractThe influence of magnetic field on the plasma which is one of the oldest problems in plasma physics and remains of great interest in plasma fusion studies, recently has been an important problem in many plasma discharge used in processing semiconductor materials, because the application of a magnetic field results in enhancement of some desirable features of specific plasma sources. In this paper, the transverse magnetic field effects on the radio frequency capacitive discharge of low and intermediate gas pressure (1.33 Pa similar to 40.00 Pa) are reviewed to clarify the role of the magnetic field in the capacitive discharge. Lots of physical phenomena induced by transverse magnetic field, such as power dissipation mode transition, low energy electron heating/cooling, axial variation of electron density and temperature and E x B drift are presented and analyzed. This article is expected to provide qualitative insight to understand the role of magnetic field in the capacitive discharges. (C) 2011 Elsevier B.V. All rights reserved.-
dc.languageEnglish-
dc.publisherELSEVIER SCIENCE SA-
dc.subjectELECTRON-ENERGY DISTRIBUTION-
dc.subjectHEATING-MODE TRANSITION-
dc.subjectRF DISCHARGE-
dc.subjectPOWER DISSIPATION-
dc.subjectCOUPLED PLASMA-
dc.subjectFREQUENCY-
dc.subjectKINETICS-
dc.subjectTRANSPORT-
dc.subjectSHEATHS-
dc.subjectARGON-
dc.titleRole of transverse magnetic field in the capacitive discharge-
dc.typeArticle-
dc.identifier.wosid000294790900074-
dc.identifier.scopusid2-s2.0-80051550914-
dc.type.rimsART-
dc.citation.volume519-
dc.citation.beginningpage6981-
dc.citation.endingpage6989-
dc.citation.publicationnameTHIN SOLID FILMS-
dc.contributor.localauthorChang, Hong-Young-
dc.contributor.nonIdAuthorYou, SJ-
dc.contributor.nonIdAuthorHai, TT-
dc.contributor.nonIdAuthorPark, M-
dc.contributor.nonIdAuthorKim, DW-
dc.contributor.nonIdAuthorKim, JH-
dc.contributor.nonIdAuthorSeong, DJ-
dc.contributor.nonIdAuthorShin, YH-
dc.contributor.nonIdAuthorLee, SH-
dc.contributor.nonIdAuthorPark, GY-
dc.contributor.nonIdAuthorLee, JK-
dc.type.journalArticleArticle; Proceedings Paper-
dc.subject.keywordAuthorCapacitive-
dc.subject.keywordAuthorDischarge-
dc.subject.keywordAuthorMagnetic field-
dc.subject.keywordAuthorLangmuir probe-
dc.subject.keywordPlusELECTRON-ENERGY DISTRIBUTION-
dc.subject.keywordPlusHEATING-MODE TRANSITION-
dc.subject.keywordPlusRF DISCHARGE-
dc.subject.keywordPlusPOWER DISSIPATION-
dc.subject.keywordPlusCOUPLED PLASMA-
dc.subject.keywordPlusFREQUENCY-
dc.subject.keywordPlusKINETICS-
dc.subject.keywordPlusTRANSPORT-
dc.subject.keywordPlusSHEATHS-
dc.subject.keywordPlusARGON-
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