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| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Surface reaction mechanisms for atomic layer deposition of silicon nitride Mui, C; Widjaja, Y; Kang, Jeung Ku; Musgrave, CB, SURFACE SCIENCE, v.557, no.1-3, pp.159 - 170, 2004-05 |