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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Chemical effect of dry and wet cleaning of the Ru protective layer of the extreme ultraviolet lithography reflector Belau, L; Park, JeongYoung; Liang, T; Seo, H; Somorjai, GA, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.27, no.4, pp.1919 - 1925, 2009-07 | |
The effects of oxygen plasma on the chemical composition and morphology of the Ru capping layer of the extreme ultraviolet mask blanks Belau, L; Park, JeongYoung; Liang, T; Somorjai, GA, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.26, no.6, pp.2225 - 2229, 2008-11 | |
Size-dependent sedimentation properties of nanocrystals Jamison, JA; Krueger, KM; Yavuz, Cafer T; Mayo, JT; LeCrone, D; Redden, JJ; Colvin, VL, ACS NANO, v.2, no.2, pp.311 - 319, 2008-02 |