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Quantum simulations for computational prototyping of nanofabrication. Musgrave, CB; Han, JH; Widjaja, Y; Mui, C; Bent, SF; Kang, Jeung Ku, ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, v.225, pp.748 - 1, 2003-03 |
Surface reaction mechanisms for atomic layer deposition of silicon nitride Mui, C; Widjaja, Y; Kang, Jeung Ku; Musgrave, CB, SURFACE SCIENCE, v.557, no.1-3, pp.159 - 170, 2004-05 |
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