Browse "Graduate school of EEWS(EEWS대학원)" by Author Seo, H

Showing results 1 to 4 of 4

1
Chemical effect of dry and wet cleaning of the Ru protective layer of the extreme ultraviolet lithography reflector

Belau, L; Park, JeongYoung; Liang, T; Seo, H; Somorjai, GA, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.27, no.4, pp.1919 - 1925, 2009-07

2
Electrochemically Enhanced Wet Cleaning of Ru Capping Thin Film for EUV Lithography Reflector

Seo, H; Park, JeongYoung; Liang, T; Somorjai, GA, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.157, no.4, pp.414 - 419, 2010

3
Improved oxidation resistance of Ru/Si capping layer for extreme ultraviolet lithography reflector

Park, JeongYoung; Belau, L; Seo, H; Somorjai, GA, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.29, no.4, 2011-07

4
Resistive Switching Behavior of CuOx/Graphene junction

Kwon, S; Seo, H; Lee, H; Jeon, KJ; Park, JeongYoung, Nano Korea 2011 Symposium, 2011-08-25

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