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Thermomechanical properties and mechanical stresses of Ge2Sb2Te5 films in phase-change random access memory

Park, Il-Mok; Jung, Jung-Kyu; Ryu, Sang-Ouk; Choi, Kyu-Jeong; Yu, Byoung-Gon; Park, Young-Bae; Han, Seung Min J.; et al, THIN SOLID FILMS, v.517, no.2, pp.848 - 852, 2008-11

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