DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Sung-Min | ko |
dc.contributor.author | Kim, Gwang-Seok | ko |
dc.contributor.author | Lee, Sang-Yul | ko |
dc.contributor.author | Lee, Jae-Wook | ko |
dc.contributor.author | Lee, JeongYong | ko |
dc.contributor.author | Lee, Bo-Young | ko |
dc.date.accessioned | 2013-03-11T05:57:25Z | - |
dc.date.available | 2013-03-11T05:57:25Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2009-03 | - |
dc.identifier.citation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.54, pp.1109 - 1114 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | http://hdl.handle.net/10203/98443 | - |
dc.description.abstract | In this work, for high-temperature applications, CrSiN/AlN multilayer coatings with various bilayer thicknesses (A) were synthesized using closed-field unbalanced magnetron sputtering (CFUBMS) and their chemical compositions, crystalline structures and mechanical properties were investigated with glow discharge optical emission spectroscopy (GDOES), X-ray diffractometry (XRD), X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM) and micro-hardness tester. Also, the thermal stability of the CrSiN/AlN multilayer coatings was evaluated by annealing the thin films at temperatures between 600 degrees C and 1000 degrees C for 30 min in air. The hardness of the CrSiN/AlN multilayer coatings was measured to be in a range from approximately 23 to 35 GPa. A maximum hardness and elastic modulus of approximately 35 and 259 GPa, respectively, were obtained from the coating with Lambda = 1.9 nm. However, the thermal stability of the CrSiN/AlN multilayer coating with Lambda = 3.0 nm was better than that of coating with Lambda = 1.9 nm and the relatively high hardness of 24 GPa was maintained even after annealing at 1000 degrees C. | - |
dc.language | English | - |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.subject | SI-N COATINGS | - |
dc.subject | NITRIDE COATINGS | - |
dc.subject | MICROSTRUCTURE | - |
dc.subject | BEHAVIOR | - |
dc.title | Mechanical Properties and Thermal Stability of CrSiN/AlN Multilayer Coatings Using a Closed-Field Unbalanced Magnetron Sputtering System | - |
dc.type | Article | - |
dc.identifier.wosid | 000264197400029 | - |
dc.identifier.scopusid | 2-s2.0-64549118763 | - |
dc.type.rims | ART | - |
dc.citation.volume | 54 | - |
dc.citation.beginningpage | 1109 | - |
dc.citation.endingpage | 1114 | - |
dc.citation.publicationname | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.contributor.localauthor | Lee, JeongYong | - |
dc.contributor.nonIdAuthor | Kim, Sung-Min | - |
dc.contributor.nonIdAuthor | Kim, Gwang-Seok | - |
dc.contributor.nonIdAuthor | Lee, Sang-Yul | - |
dc.contributor.nonIdAuthor | Lee, Bo-Young | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | CrSiN/AlN multilayer | - |
dc.subject.keywordAuthor | Thermal stability | - |
dc.subject.keywordAuthor | Hardness | - |
dc.subject.keywordPlus | SI-N COATINGS | - |
dc.subject.keywordPlus | NITRIDE COATINGS | - |
dc.subject.keywordPlus | MICROSTRUCTURE | - |
dc.subject.keywordPlus | BEHAVIOR | - |
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