Modelling and analysis of semiconductor manufacturing in a shrinking world: challenges and successes

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This paper presents a brief overview of semiconductor manufacturing followed by the results of a panel session held at the Fourth International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) in Miami, December 10, 2008 on the role of modelling and analysis in semiconductor manufacturing in a shrinking world. Three participants are from Asia, two from Europe, and two from the USA in addition to the two panel organisers (Fowler and Monch). At least one panellist from each continent is from industry and one from academia. The statements of the panellists from industry relate to modelling and analysis problems found in their own companies. Those of the academic panellists describe the role that modelling and analysis has played and is expected to play in their semiconductor manufacturing research. Their views on the challenges and successes of modelling and analysis in a globalised world are also included. Finally, we identify some future research challenges for semiconductor manufacturing. [Received: 01 March 2010; Revised: 16 April 2010; Accepted: 01 May 2010]
Publisher
INDERSCIENCE ENTERPRISES LTD
Issue Date
2011
Language
English
Article Type
Article
Keywords

WAFER FABRICATION FACILITIES; SCHEDULING MODELS; SYSTEM; FABS; ALGORITHM; INDUSTRY; DESIGN; TIME

Citation

EUROPEAN JOURNAL OF INDUSTRIAL ENGINEERING, v.5, no.3, pp.254 - 271

ISSN
1751-5254
URI
http://hdl.handle.net/10203/97919
Appears in Collection
IE-Journal Papers(저널논문)
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