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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Journal Papers(저널논문)

Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities

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dc.contributor.authorGehl, Michaelko
dc.contributor.authorGibson, Rickyko
dc.contributor.authorHendrickson, Joshuako
dc.contributor.authorHomyk, Andrewko
dc.contributor.authorSaynatjoki, Anttiko
dc.contributor.authorAlasaarela, Tapaniko
dc.contributor.authorKarvonen, Lasseko
dc.contributor.authorTervonen, Ariko
dc.contributor.authorHonkanen, Seppoko
dc.contributor.authorZandbergen, Sanderko
dc.contributor.authorRichards, Benjamin C.ko
dc.contributor.authorOlitzky, J. D.ko
dc.contributor.authorScherer, Axelko
dc.contributor.authorKhitrova, Galinako
dc.contributor.authorGibbs, Hyatt M.ko
dc.contributor.authorKim, Ju-Youngko
dc.contributor.authorLee, YHko
dc.date.accessioned2013-03-09T20:26:11Z-
dc.date.available2013-03-09T20:26:11Z-
dc.date.created2012-04-06-
dc.date.created2012-04-06-
dc.date.issued2012-02-
dc.identifier.citationJOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, v.29, no.2, pp.55 - 59-
dc.identifier.issn0740-3224-
dc.identifier.urihttp://hdl.handle.net/10203/97401-
dc.description.abstractIn this work we study the effect of thin-film deposition on the quality factor (Q) of silicon nanobeam cavities. We observe an average increase in the Q of 38 +/- 31% in one sample and investigate the dependence of this increase on the initial nanobeam hole sizes. We note that this process can be used to modify cavities that have larger than optimal hole sizes following fabrication. Additionally, the technique allows the tuning of the cavity mode wavelength and the incorporation of new materials, without significantly degrading Q. (C) 2012 Optical Society of America-
dc.languageEnglish-
dc.publisherOPTICAL SOC AMER-
dc.subjectCURVED-MICROFIBER-
dc.titleEffect of atomic layer deposition on the quality factor of silicon nanobeam cavities-
dc.typeArticle-
dc.identifier.wosid000300407300009-
dc.identifier.scopusid2-s2.0-84863115233-
dc.type.rimsART-
dc.citation.volume29-
dc.citation.issue2-
dc.citation.beginningpage55-
dc.citation.endingpage59-
dc.citation.publicationnameJOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS-
dc.contributor.localauthorLee, YH-
dc.contributor.nonIdAuthorGehl, Michael-
dc.contributor.nonIdAuthorGibson, Ricky-
dc.contributor.nonIdAuthorHendrickson, Joshua-
dc.contributor.nonIdAuthorHomyk, Andrew-
dc.contributor.nonIdAuthorSaynatjoki, Antti-
dc.contributor.nonIdAuthorAlasaarela, Tapani-
dc.contributor.nonIdAuthorKarvonen, Lasse-
dc.contributor.nonIdAuthorTervonen, Ari-
dc.contributor.nonIdAuthorHonkanen, Seppo-
dc.contributor.nonIdAuthorZandbergen, Sander-
dc.contributor.nonIdAuthorRichards, Benjamin C.-
dc.contributor.nonIdAuthorOlitzky, J. D.-
dc.contributor.nonIdAuthorScherer, Axel-
dc.contributor.nonIdAuthorKhitrova, Galina-
dc.contributor.nonIdAuthorGibbs, Hyatt M.-
dc.type.journalArticleArticle-
dc.subject.keywordPlusCURVED-MICROFIBER-
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PH-Journal Papers(저널논문)
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