DC Field | Value | Language |
---|---|---|
dc.contributor.author | Debnath, Sanjit K. | ko |
dc.contributor.author | Kim, Seung-Woo | ko |
dc.contributor.author | Kothiyal, Mahendra P. | ko |
dc.contributor.author | Hariharan, Parameswaran | ko |
dc.date.accessioned | 2013-03-09T15:56:52Z | - |
dc.date.available | 2013-03-09T15:56:52Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2010-12 | - |
dc.identifier.citation | APPLIED OPTICS, v.49, no.34, pp.6624 - 6629 | - |
dc.identifier.issn | 0003-6935 | - |
dc.identifier.uri | http://hdl.handle.net/10203/96795 | - |
dc.description.abstract | Spectrally resolved white-light phase-shifting interference microscopy has been used for measurements of the thickness profile of a transparent thin-film layer deposited upon a patterned structure exhibiting steps and discontinuities. We describe a simple technique, using an approach based on spectrally resolved optical coherence tomography, that makes it possible to obtain directly a thickness profile along a line by inverse Fourier transformation of the complex spectral interference function. (C) 2010 Optical Society of America | - |
dc.language | English | - |
dc.publisher | OPTICAL SOC AMER | - |
dc.subject | WHITE-LIGHT INTERFEROMETRY | - |
dc.subject | ACOUSTOOPTIC TUNABLE FILTER | - |
dc.subject | STEP-HEIGHT MEASUREMENT | - |
dc.subject | THICKNESS-PROFILE | - |
dc.subject | PROFILOMETRY | - |
dc.subject | INTERFEROGRAMS | - |
dc.subject | RANGE | - |
dc.title | Spectrally resolved phase-shifting interference microscopy: technique based on optical coherence tomography for profiling a transparent film on a patterned substrate | - |
dc.type | Article | - |
dc.identifier.wosid | 000284830500017 | - |
dc.identifier.scopusid | 2-s2.0-78650427193 | - |
dc.type.rims | ART | - |
dc.citation.volume | 49 | - |
dc.citation.issue | 34 | - |
dc.citation.beginningpage | 6624 | - |
dc.citation.endingpage | 6629 | - |
dc.citation.publicationname | APPLIED OPTICS | - |
dc.identifier.doi | 10.1364/AO.49.006624 | - |
dc.contributor.localauthor | Kim, Seung-Woo | - |
dc.contributor.nonIdAuthor | Debnath, Sanjit K. | - |
dc.contributor.nonIdAuthor | Kothiyal, Mahendra P. | - |
dc.contributor.nonIdAuthor | Hariharan, Parameswaran | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | WHITE-LIGHT INTERFEROMETRY | - |
dc.subject.keywordPlus | ACOUSTOOPTIC TUNABLE FILTER | - |
dc.subject.keywordPlus | STEP-HEIGHT MEASUREMENT | - |
dc.subject.keywordPlus | THICKNESS-PROFILE | - |
dc.subject.keywordPlus | PROFILOMETRY | - |
dc.subject.keywordPlus | INTERFEROGRAMS | - |
dc.subject.keywordPlus | RANGE | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.