Vibration-desensitized interferometer by continuous phase shifting with high-speed fringe capturing

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Optical interferometers for surface metrology require high immunity to vibration when they are to be used outside the laboratory environment. Here we describe a continuous phase-shifting method as a means of vibration suppression, which implements phase shifting uninterruptedly while capturing resulting interference fringes at a high rate. The continuous phase shifting allows the interference initial phase under measurement to be locked to a single temporal frequency in captured fringes, thereby being recovered free from vibration by Fourier-based postprocessing. This continuous phase-shifting method can be realized with any phase-shifting interferometers by incorporating a high-speed digital camera with good intensity-to-voltage conversion linearity. (C) 2009 Optical Society of America
Publisher
OPTICAL SOC AMER
Issue Date
2010-01
Language
English
Article Type
Article
Citation

OPTICS LETTERS, v.35, no.1, pp.19 - 21

ISSN
0146-9592
DOI
10.1364/OL.35.000019
URI
http://hdl.handle.net/10203/96532
Appears in Collection
ME-Journal Papers(저널논문)
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