계단 모양 전극을 가진 미세펌프 해석

Abstract

The flow rate is higher in ACEO micro-pumps with step electrodes than in micro-pumps with planar asymmetric electrodes. In the present study, numerical simulations were made of a ACEO micro-pump with step electrodes to investigate the effects of electrode design parameters on the pumping flow rate. The electrical charge at the electrodes, the fluid flow, and potential were solved, taking into account the finite size of ions, that is, the steric effect. This effect is recognized to be capable of quantifying the electrical charge more accurately in the electrical double layer subject to high voltages. Geometrical parameters such as heights, widths, and gaps of three-dimensional electrodes were optimized to enhance the pumping flow rate. Moreover, the effect of amplitude and frequency of AC was studied.