Robust free space board-to-board optical interconnect with closed loop MEMS tracking

Cited 14 time in webofscience Cited 0 time in scopus
  • Hit : 380
  • Download : 0
We present a free-space optical interconnect system capable of dynamic closed-loop optical alignment using a microlens scanner with a proportional integral and derivative controller. Electrostatic microlens scanners based on combdrive actuators are designed and characterized with vertical cavity surface emitting lasers (VCSELs) for adaptive optical beam tracking in the midst of mechanical vibration noise. The microlens scanners are fabricated on silicon-on-insulator wafers with a bulk micromachining process using deep reactive ion etching. We demonstrate dynamic optical beam positioning with a 700 Hz bandwidth and a maximum noise reduction of approximately 40 dB. Eye diagrams with a 1 Gb/s modulation rate are presented to demonstrate the improved optical link in the presence of mechanical noise.
Publisher
SPRINGER
Issue Date
2009-06
Language
English
Article Type
Article
Keywords

COMB-DRIVE ACTUATORS; OPTOELECTRONIC SYSTEMS; MICROLENS ARRAY; SCANNER ARRAY; DESIGN; MICROMIRRORS; MICROSCOPE; LENS

Citation

APPLIED PHYSICS A-MATERIALS SCIENCE PROCESSING, v.95, no.4, pp.973 - 982

ISSN
0947-8396
DOI
10.1007/s00339-009-5126-1
URI
http://hdl.handle.net/10203/95553
Appears in Collection
EE-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 14 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0