DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, Young-Man | ko |
dc.contributor.author | Gweon, Dae-Gab | ko |
dc.date.accessioned | 2013-03-09T05:51:49Z | - |
dc.date.available | 2013-03-09T05:51:49Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2011-10 | - |
dc.identifier.citation | IEEE-ASME TRANSACTIONS ON MECHATRONICS, v.16, no.5, pp.925 - 931 | - |
dc.identifier.issn | 1083-4435 | - |
dc.identifier.uri | http://hdl.handle.net/10203/95527 | - |
dc.description.abstract | In this paper, a high-precision dual-servo stage with a magnetically levitated fine stage is described. For magnetic levitation, a Halbach linear active magnetic bearing (HLAMB) is used. The HLAMB has two functions: gravity compensation and actively control of vertical motion. To implement these functions, the HLAMB utilizes permanent magnet arrays and Lorentz coils. The fine stage has positioning capabilities with 6 DOF due to four HLAMBs and four voice coil motors (VCM). The HLAMBs control out-of-plane motions, and the VCM control in-plane motions. The fine stage achieves high-precision position feedback using laser interferometers and capacitive sensors. The coarse stage has an H-type structure that can carry the fine stage 300 mm by 300 mm along the x- and y-axes. Positioning and scanning performances are verified by the experimental results. It has +/- 10 and +/- 15 nm in-position stability in the x- and y-axes, respectively. At the scan with 10 mm/s constant velocity, +/- 1 nm mean tracking error and 4.7 nm jitter were obtained. | - |
dc.language | English | - |
dc.publisher | IEEE-Inst Electrical Electronics Engineers Inc | - |
dc.title | A High-Precision Dual-Servo Stage Using Halbach Linear Active Magnetic Bearings | - |
dc.type | Article | - |
dc.identifier.wosid | 000294550100018 | - |
dc.identifier.scopusid | 2-s2.0-80052362578 | - |
dc.type.rims | ART | - |
dc.citation.volume | 16 | - |
dc.citation.issue | 5 | - |
dc.citation.beginningpage | 925 | - |
dc.citation.endingpage | 931 | - |
dc.citation.publicationname | IEEE-ASME TRANSACTIONS ON MECHATRONICS | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | Choi, Young-Man | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Electromagnets | - |
dc.subject.keywordAuthor | magnetic levitation | - |
dc.subject.keywordAuthor | motion control | - |
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