Suspended Spiral Inductor and Band-Pass Filter on Thick Anodized Aluminum Oxide
We make suspended inductors and 2.45 GHz BPFs on the selectively anodized aluminum. The thick anodized alumina is used as the supporting dielectric and it is easily removed by using chemical wet-etching. The thickness of anodized alumina is 80 m and the depth of the total air-cavity is 200 m. The fabricated inductor over an air cavity has a 25% greater Q factor and 21% higher inductance at 2 GHz compared to an inductor on anodized aluminum. The 2.45 GHz BPF adjusting the suspended inductors has 2.8 dB of insertion loss with a narrow bandwidth.
- Issue Date
- 2009-10
- Language
- English
- Article Type
- Article
- Keywords
FABRICATION
- Citation
IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, v.19, no.10, pp.620 - 622
- ISSN
- 1531-1309
- Appears in Collection
- EE-Journal Papers(저널논문)
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