나노초 레이저 가공에서 초음파 진동이 가공표면에 미치는 영향

Abstract

Conventionally, the machined surface roughness in nano-second(ns) laser machining is damaged and rough due to thermal effects. To obtain the improved surface finish, the ultrasonic vibration is applied to ns-laser machining. The ultrasonic vibration jig is developed to apply the ultrasonic high precision motion to workpieces. And then the ns-laser machining is conducted to compare the effects of the ultrasonic vibration. The results show that the surface roughness with ultrasonic vibration is smoother than that without the vibration. The phenomenon could be explained as enhancement of heat transfer by ultrasonic vibration.