DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Seung-hoon | ko |
dc.contributor.author | Yoo, Suk Jae | ko |
dc.contributor.author | Chang, Choong-Seock | ko |
dc.date.accessioned | 2013-03-08T20:46:50Z | - |
dc.date.available | 2013-03-08T20:46:50Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2010-09 | - |
dc.identifier.citation | THIN SOLID FILMS, v.518, no.22, pp.6408 - 6411 | - |
dc.identifier.issn | 0040-6090 | - |
dc.identifier.uri | http://hdl.handle.net/10203/94248 | - |
dc.description.abstract | Application of a hyperthermal neutral beam source is one of the candidate methods of reducing plasma induced damage problems. The neutral beam is generated by vertical collisions between energetic ions and a reflector composed of metal. However, it is difficult to measure the neutral angle and energy distribution experimentally. We simulate the hyperthermal neutral beam (HNB) generation using a molecular dynamics algorithm. In order to obtain a low energy neutral beam, ions with various energies are vertically projected onto the reflector surface. A rough surface structure that has been experimentally measured is used for a realistic simulation. The energy distributions are obtained and the ratio of energy of reflected neutral particles agrees with experimental data. (C) 2010 Elsevier B.V. All rights reserved. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.title | The properties of low energy neutral particles in a neutral beam source: A molecular dynamics study | - |
dc.type | Article | - |
dc.identifier.wosid | 000282242600059 | - |
dc.identifier.scopusid | 2-s2.0-77956055991 | - |
dc.type.rims | ART | - |
dc.citation.volume | 518 | - |
dc.citation.issue | 22 | - |
dc.citation.beginningpage | 6408 | - |
dc.citation.endingpage | 6411 | - |
dc.citation.publicationname | THIN SOLID FILMS | - |
dc.identifier.doi | 10.1016/j.tsf.2010.03.054 | - |
dc.contributor.localauthor | Chang, Choong-Seock | - |
dc.contributor.nonIdAuthor | Yoo, Suk Jae | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | Hyperthermal | - |
dc.subject.keywordAuthor | Neutral beam | - |
dc.subject.keywordAuthor | Molecular dynamics | - |
dc.subject.keywordAuthor | Ion-surface | - |
dc.subject.keywordPlus | TRANSITION-METALS | - |
dc.subject.keywordPlus | DAMAGE | - |
dc.subject.keywordPlus | SIMULATION | - |
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