포신 강선의 마모 깊이 측정을 위한 정전용량 방식의 MEMS 간극센서

Abstract

MEMS capacitive gap sensor is developed for measuring abrasion depth of gun barrel rifling. Measuring abrasion depth of gun barrel rifling is very important because it is related with exactness of firing and life of arms. The method using a gap sensor is not to hurt rifling. And it can measure abrasion depth through minimum shooting, because the developed gap sensor can measure from 1 ㎛ ~ 12 ㎛ using Polydimethylsiloxane(PDMS) material and making a stretchable electrode on PDMS. And it’s resolution is 1㎛ using capacitive method and MEMS technology.