DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, J. | ko |
dc.contributor.author | You, J. | ko |
dc.contributor.author | Kim, Seung-Woo | ko |
dc.date.accessioned | 2013-03-08T17:58:23Z | - |
dc.date.available | 2013-03-08T17:58:23Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2009 | - |
dc.identifier.citation | CIRP ANNALS-MANUFACTURING TECHNOLOGY, v.58, no.1, pp.473 - 476 | - |
dc.identifier.issn | 0007-8506 | - |
dc.identifier.uri | http://hdl.handle.net/10203/93825 | - |
dc.description.abstract | We describe an industrial interferometer designed to conduct high-precision surface measurements in the presence of severe vibration. The principle of common-path interferometry is realized by devising a single-mode fiber waveguide that generates the reference wave directly from the measurement wave, enabling removal of the temporal wavefront fluctuation caused by vibration. In addition, a continuous-scanning phase-measuring method is adopted to isolate spurious vibration residuals in interferometric fringes captured using a high-speed digital camera. Experimental tests prove that the proposed interferometer is suited for in-line measurements of large mirrors, silicon wafers, and flat display panels with no excessive ground isolation for anti-vibration. (c) 2009 CIRP. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.subject | PHASE-SHIFTING INTERFEROMETRY | - |
dc.title | Vibration-desensitized fiber-diffraction interferometer for industrial surface measurements | - |
dc.type | Article | - |
dc.identifier.wosid | 000267276100116 | - |
dc.identifier.scopusid | 2-s2.0-67349244693 | - |
dc.type.rims | ART | - |
dc.citation.volume | 58 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 473 | - |
dc.citation.endingpage | 476 | - |
dc.citation.publicationname | CIRP ANNALS-MANUFACTURING TECHNOLOGY | - |
dc.identifier.doi | 10.1016/j.cirp.2009.03.006 | - |
dc.contributor.localauthor | Kim, Seung-Woo | - |
dc.contributor.nonIdAuthor | Park, J. | - |
dc.contributor.nonIdAuthor | You, J. | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Optical | - |
dc.subject.keywordAuthor | Measurement | - |
dc.subject.keywordAuthor | Vibration | - |
dc.subject.keywordPlus | PHASE-SHIFTING INTERFEROMETRY | - |
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