Optically Selective Microlens Photomasks Using Self-Assembled Smectic Liquid Crystal Defect Arrays

Cited 33 time in webofscience Cited 0 time in scopus
  • Hit : 357
  • Download : 319
A photomask that combines two imaging elements (microlens arrays and clear windows) in one structure has been developed by using toric focal conic domain (TFCD) micro arrays of smectic liquid crystals. Their application as optically selective photomasks by simply adjusting (i) the illumination dose, (ii) the size of TFCD array mask, and (iii) the tone of photoresist (PR) is demonstrated (see figure).
Publisher
WILEY-V C H VERLAG GMBH
Issue Date
2010-06
Language
English
Article Type
Article
Keywords

FOCAL CONIC DOMAINS; PROJECTION PHOTOLITHOGRAPHY; 2-DIMENSIONAL ARRAYS; FABRICATION; MICROSPHERES

Citation

ADVANCED MATERIALS, v.22, no.22, pp.2416 - 2416

ISSN
0935-9648
DOI
10.1002/adma.200903728
URI
http://hdl.handle.net/10203/93669
Appears in Collection
NT-Journal Papers(저널논문)EE-Journal Papers(저널논문)CBE-Journal Papers(저널논문)
Files in This Item
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 33 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0