VARIABLE VIEW IMAGING SYSTEM: AN OPTOMECHATRONIC SYSTEM FOR THE OBSERVATION OF MICRO OBJECTS WITH VARIABLE VIEW DIRECTION

Abstract

Insufficient vision information of conventional vision systems hinders the applications of vision-based microassembly and micromanipulation. In this article, an optomechatronic system with a variable view position and orientation is proposed to solve this problem, which is particularly suitable for observing three-dimensional micro objects in micromanipulation and microassembly. The integration of double wedge prisms and scanning mirrors gives a flexible view in a compact manner. In order to correct the variable aberrations induced by the wedge prisms and scanning mirror, a micromachined membrane deformable mirror (MMDM) is integrated in the system. Additionally, an optomechatronic design process for the proposed system is introduced. The view position and angle are analyzed by a ray tracing method. The proposed algorithm for MMDM can correct the aberrations in each Zernike mode without using a wavefront sensor instead of controlling each actuator. A series of experiments is conducted to investigate the validity of the prototype system.