In this letter, a high-performance 5-bit CMOS phase shifter using a newly proposed 180 bit is presented for a Ku-band mobile satellite phased array receiver. The 180 phase shifter exhibits good tolerance to substrate parasitic capacitances when compared with a conventional high-pass/low-pass type one. The designed 5-bit CMOS phase shifter demonstrates a typical 11.7 dB +/- 0.5 dB insertion loss and a 2.1 degrees rms phase shift error at 12.2 GHz. (C) 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 1325-1328, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.25214