Measuring and compensating for 5-DOF parasitic motion errors in translation stages using Twyman-Green interferometry

Abstract

A new metrological method is presented that performs simultaneous real-time measurements and compensates for 5-DOF parasitic motion errors in translation stages for precision profiling of optical surfaces. Two plane mirrors are used to obtain motion-dependent interferometric fringes generated by the optical principles of Twyman-Green interferometry. The fringes generated are monitored using high-speed 2D photodiode arrays and analyzed to determine the five separate motion error components in real time. Simultaneously, null control is performed to suppress the measured motion errors independently using piezoelectric actuators through real-time feedback control while the machine axis is moving. The experimental results demonstrate that 5-DOF parasitic motion errors are effectively measured and compensated to within 10 nm for translational motions and 0.15 arcsec for angular motions. (c) 2005 Elsevier Ltd. All rights reserved.