Biosensor utilizing resist-derived carbon nanostructures

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The authors present a biosensor using pyrolyzed electron beam resist nanostructures as an active conducting channel. Versatile, arbitrarily shaped nanostructures such as nanowires, nanodots, and suspended nanobridges are fabricated by a facile electron beam resist thermal decomposition method. The nanostructures typically show 15-21 nm thickness, 100-200 nm width, 0.6 nm roughness, and p-type majority conduction with tailored resistivity of 5.2-0.75 Omega cm. Streptavidin-biotin binding and pH dependent conductance modulation are demonstrated using pyrolyzed resist based devices. (c) 2007 American Institute of Physics.
Publisher
AMER INST PHYSICS
Issue Date
2007-06
Language
English
Article Type
Article
Keywords

PYROLYZED PHOTORESIST; NANOWIRE; SENSORS; FILMS; RECOGNITION; FABRICATION; DNA

Citation

APPLIED PHYSICS LETTERS, v.90, no.26, pp.105 - 113

ISSN
0003-6951
DOI
10.1063/1.2752719
URI
http://hdl.handle.net/10203/92287
Appears in Collection
ME-Journal Papers(저널논문)
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