열 대류 가속도계의 성능향상에 관한 연구A Study on the Performance Improvement of the Micromachined Convective Accelerometer

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A micromachined convective accelerometer is a recently developed device. Typical micromachined accelerometers use a solid proof mass for measuring acceleration. But a micromachined convective accelerometer does not use a solid proof mass. A micromachined convective accelerometer is composed of a heating resistor and temperature sensors. This device measures acceleration by using convective heat transfer phenomenon. Therefore characteristics of a micromachined convective accelerometer are different as compared with typical micromachined accelerometer. In this research, we analyze the convective accelerometer by using transient convective heat transfer analysis. Based on the results of a convective accelerometer, we propose a new model which has improved performance.
Publisher
대한기계학회
Issue Date
2007-05
Language
Korean
Citation

대한기계학회논문집 A, v.31, no.5, pp.570 - 577

ISSN
1226-4873
URI
http://hdl.handle.net/10203/92024
Appears in Collection
ME-Journal Papers(저널논문)
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