Distinguished student paper: Ultra-slim barrier ribs for plasma display panel by X-ray lithography process

Abstract

X-ray lithography is one of the most powerful processes in the fabrication of nano/micro structures with a high aspect ratio. This process enables the fabrication of closed-cell type ultra-slim barrier ribs for PDP. In this paper, ultra-slim barrier ribs of 12 μm upper width before sintering were fabricated by x-ray lithography. © 2007 SID.