Study on the mode transitions for rf power dissipation in capacitively coupled plasma

Abstract

We present rf power dissipation mode transitions in capacitively coupled plasma (CCP) at various experimental conditions. We investigated power dissipation mode transitions from ion-dominated to electron-dominated dissipation mode and vice versa. Suggesting a modified simple model for rf dissipation, we theoretically evaluated the mode transitions induced by changing rf current, gas pressure, driving frequency, magnetic field, and gas species. We also observed power dissipation mode transitions for various experimental conditions by measuring the electrical characteristics. The calculated result from the simple model agreed well with the experimental result. Through a consideration of the power dissipation mode transition under different experimental conditions, this study suggests various ways to control rf power dissipation between electrons and ions. (c) 2004 Elsevier B.V All rights reserved.