Fluctuation smoothing production control at IBM’s 200mm wafer fabricator: Extensions, application and the multi-flow production index (MFPx)
- Publisher
- IEEE
- Issue Date
- 2006-05
- Language
- ENG
- Citation
Proceedings of the 2006 IEEE/SEMI Advanced Semiconductor Manufacturing Conference
- Appears in Collection
- IE-Conference Papers(학술회의논문)
- Files in This Item
- 2006%20-%20IEEE%20ASMC%20-%20Final%20-%20MFPx%2...(337.45 kB)Download
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