DC Field | Value | Language |
---|---|---|
dc.contributor.author | Oh, Il-Kwon | ko |
dc.contributor.author | Lee, Dong-Weon | ko |
dc.date.accessioned | 2013-03-07T20:32:32Z | - |
dc.date.available | 2013-03-07T20:32:32Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2007-05 | - |
dc.identifier.citation | MICROELECTRONIC ENGINEERING, v.84, no.5-8, pp.1388 - 1392 | - |
dc.identifier.issn | 0167-9317 | - |
dc.identifier.uri | http://hdl.handle.net/10203/91254 | - |
dc.description.abstract | The possibility to control the mistuned resonant frequency of multi-layered micro-resonators by piezoelectric actuations is numerically investigated. In many cases, there are mismatches of resonant frequency and initial imperfections of the multi-layered micro-resonators because of fabrication errors due to the difficulty of resolution control and mismatches of material properties. In this study, the multi-layered micro-resonators with initial imperfections were modeled by using refined layerwise theory and initial thermal loading. The nonlinear deformation and its attendant vibration characteristics of un-symmetrically deposited camped-camped micro-beams under piezoelectric and thermal actuations are extensively investigated. To derive the governing nonlinear finite element equations of the micro-beams, the incremental total Lagrangian description based on the multi-field layerwise theory is applied, considering geometric nonlinear strains and material inhomogeneity of multi-layered micro-resonators. Present results show that piezoelectric actuations can effectively tune the resonant frequencies of the imperfect multi-layered micro-resonators by controlling the in-plane and out-of-plane displacements. (c) 2007 Elsevier B.V. All rights reserved. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.title | Resonant frequency and instability of multi-layered micro-resonators with initial imperfection subject to piezoelectric loads | - |
dc.type | Article | - |
dc.identifier.wosid | 000247182500162 | - |
dc.identifier.scopusid | 2-s2.0-34247563421 | - |
dc.type.rims | ART | - |
dc.citation.volume | 84 | - |
dc.citation.issue | 5-8 | - |
dc.citation.beginningpage | 1388 | - |
dc.citation.endingpage | 1392 | - |
dc.citation.publicationname | MICROELECTRONIC ENGINEERING | - |
dc.identifier.doi | 10.1016/j.mee.2007.01.103 | - |
dc.contributor.localauthor | Oh, Il-Kwon | - |
dc.contributor.nonIdAuthor | Lee, Dong-Weon | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | resonator | - |
dc.subject.keywordAuthor | instability | - |
dc.subject.keywordAuthor | imperfection | - |
dc.subject.keywordAuthor | piezoelectric | - |
dc.subject.keywordPlus | MICROMECHANICAL RESONATORS | - |
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