DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, YB | ko |
dc.contributor.author | Min, Bumki | ko |
dc.contributor.author | Vahala, KJ | ko |
dc.contributor.author | Atwater, HA | ko |
dc.date.accessioned | 2013-03-07T19:32:28Z | - |
dc.date.available | 2013-03-07T19:32:28Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-06 | - |
dc.identifier.citation | ADVANCED MATERIALS, v.18, no.12, pp.1533 - 1533 | - |
dc.identifier.issn | 0935-9648 | - |
dc.identifier.uri | http://hdl.handle.net/10203/91092 | - |
dc.description.abstract | integration of high-quality ferroelectric thin films, e.g., LiNbO3, in planar device architectures on silicon substrates remains a technological challenge. The successful fabrication of a suspended micro-disk resonator structure (see figure) suggests that the method reported here -a combination of wafer bonding, ion implantation, and layer transfer induced by laser irradiation-may be useful in optoelectronic device applications. | - |
dc.language | English | - |
dc.publisher | WILEY-V C H VERLAG GMBH | - |
dc.subject | LITHIUM-NIOBATE | - |
dc.subject | LIFTOFF | - |
dc.title | Integration of single-crystal LiNbO3 thin film on silicon by laser irradiation and ion implantation-induced layer transfer | - |
dc.type | Article | - |
dc.identifier.wosid | 000238727100008 | - |
dc.identifier.scopusid | 2-s2.0-33745572395 | - |
dc.type.rims | ART | - |
dc.citation.volume | 18 | - |
dc.citation.issue | 12 | - |
dc.citation.beginningpage | 1533 | - |
dc.citation.endingpage | 1533 | - |
dc.citation.publicationname | ADVANCED MATERIALS | - |
dc.identifier.doi | 10.1002/adma.200502364 | - |
dc.contributor.localauthor | Min, Bumki | - |
dc.contributor.nonIdAuthor | Park, YB | - |
dc.contributor.nonIdAuthor | Vahala, KJ | - |
dc.contributor.nonIdAuthor | Atwater, HA | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | LITHIUM-NIOBATE | - |
dc.subject.keywordPlus | LIFTOFF | - |
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