DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, KH | ko |
dc.contributor.author | Jung, JC | ko |
dc.contributor.author | Kim, KS | ko |
dc.contributor.author | Kim, Jin-Baek | ko |
dc.date.accessioned | 2013-03-07T19:11:25Z | - |
dc.date.available | 2013-03-07T19:11:25Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2005-05 | - |
dc.identifier.citation | POLYMERS FOR ADVANCED TECHNOLOGIES, v.16, no.5, pp.387 - 392 | - |
dc.identifier.issn | 1042-7147 | - |
dc.identifier.uri | http://hdl.handle.net/10203/91028 | - |
dc.description.abstract | A new positive-working polyimide having photosensitive o-nitrobenzyl ester group as side substituent, poly(1,4-phenyleneoxy-1,4-phenylene-3,6-di[4-(o-nitrobenzyloxy)carbonylphenyl]pyromellit imide] (ODA-PI-Nb), was prepared and its aqueous alkali-developability and photosensitivity were investigated. ODA-PI-Nb was synthesized by the esterification reaction of poly[1,4-phenyleneoxy-1.4-phenylene-3,6-di(4-carboxylphenyl)pyromellit imide] (ODA-PI) with o-nitrobenzyl bromide in the presence of triethylamine (Et3N). ODA-PI-Nb obtained was characterized by FT-IR and H-1-NMR spectroscopy. The degree of esterification reaction was found from H-1-NMR absorption of CH2 proton to be over 95mol%. Upon photo-irradiation ODA-PI-Nb transformed to the freely aqueous alkali-soluble ODA-PI under formation of o-nitrosobenzaldehyde. The thickness loss of thin ODA-PI-Nb films upon post-baking at 400 degrees C was in the 10-15% range. ODA-PI-Nb showed positive-tone behavior in characteristic sensitivity curve and positive patterns were obtained using a typical lithographic process using aqueous tetramethylammonium hydroxide developer. The patterns with excellent resolution were observed and evaluated by optical microscopy and scanning electron microscopy. Copyright (c) 2005 John Wiley & Sons, Ltd. | - |
dc.language | English | - |
dc.publisher | JOHN WILEY & SONS LTD | - |
dc.title | New base-soluble positive-working photosensitive polyimides having o-nitrobenzyl ester group | - |
dc.type | Article | - |
dc.identifier.wosid | 000229253600005 | - |
dc.identifier.scopusid | 2-s2.0-18944387370 | - |
dc.type.rims | ART | - |
dc.citation.volume | 16 | - |
dc.citation.issue | 5 | - |
dc.citation.beginningpage | 387 | - |
dc.citation.endingpage | 392 | - |
dc.citation.publicationname | POLYMERS FOR ADVANCED TECHNOLOGIES | - |
dc.identifier.doi | 10.1002/pat.601 | - |
dc.contributor.localauthor | Kim, Jin-Baek | - |
dc.contributor.nonIdAuthor | Choi, KH | - |
dc.contributor.nonIdAuthor | Jung, JC | - |
dc.contributor.nonIdAuthor | Kim, KS | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | polyimides | - |
dc.subject.keywordAuthor | photosensitive | - |
dc.subject.keywordAuthor | alkali-developable | - |
dc.subject.keywordAuthor | esterification | - |
dc.subject.keywordAuthor | FT-IR | - |
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