A comprehensive investigation of thermal treatment effects on resonance characteristics in FBAR devices
This paper presents some methods to improve the resonance characteristics of film bulk acoustic-wave resonator (FBAR) devices. The FBAR devices were fabricated on Bragg reflectors. Thermal treatments were done using sintering and/or annealing processes. The measurement shows a considerable improvement of return loss (S-11) and quality factor (Q(8/p)). These thermal treatments seem very promising for enhancing the FBAR's resonance performance. (c) 2005 Wiley Periodicals, Inc.
- Publisher
- JOHN WILEY & SONS INC
- Issue Date
- 2005-12
- Language
- English
- Article Type
- Article
- Citation
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, v.47, pp.459 - 462
- ISSN
- 0895-2477
- Appears in Collection
- EE-Journal Papers(저널논문)
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