Fabrication of three-dimensional curved microstructures by two-photon polymerization employing multi-exposure voxel matrix scanning method

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dc.contributor.authorLim, TWko
dc.contributor.authorPark, SHko
dc.contributor.authorYang, Dong-Yolko
dc.contributor.authorKong, Hong-Jinko
dc.contributor.authorLee, KSko
dc.date.accessioned2013-03-07T09:05:49Z-
dc.date.available2013-03-07T09:05:49Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2005-07-
dc.identifier.citationPOLYMER-KOREA, v.29, pp.418 - 421-
dc.identifier.issn0379-153X-
dc.identifier.urihttp://hdl.handle.net/10203/89841-
dc.description.abstractThree-dimensional (3D) microfabrication process using two- photon polymerization (TPP) is developed to fabricate the curved microstructures in a layer, which can be applied potentially to optical MEMS, nanc/micro-devices, etc. A 3D curved structure can be expressed using the same height-contours that are defined by symbolic colors which consist of 14 colors. Then, the designed bitmap figure is transformed into a multi-exposure voxel matrix (MVM). In this work, a multi-exposure voxel matrix scanning method is used to generate various heights of voxels according to each laser exposure time that is assigned to the symbolic colors. An objective lens with a numerical aperture of 1.25 is employed to enlarge the variation of a voxel height in the range of 1.2 to 6.4 mu m, which can be controlled easily using the various exposure time. Through this work some 3D curved micro-shapes are fabricated directly to demonstrate the usefulness of the process without a laminating process that is generally required in a micro-stereolithography process.-
dc.languageEnglish-
dc.publisherPOLYMER SOC KOREA-
dc.subjectPRESSURE-DIFFERENCE TECHNIQUE-
dc.subjectLASER NANOFABRICATION-
dc.subjectPHOTOPOLYMERIZATION-
dc.subjectMICROFABRICATION-
dc.titleFabrication of three-dimensional curved microstructures by two-photon polymerization employing multi-exposure voxel matrix scanning method-
dc.typeArticle-
dc.identifier.wosid000232834600017-
dc.identifier.scopusid2-s2.0-27644507058-
dc.type.rimsART-
dc.citation.volume29-
dc.citation.beginningpage418-
dc.citation.endingpage421-
dc.citation.publicationnamePOLYMER-KOREA-
dc.contributor.localauthorYang, Dong-Yol-
dc.contributor.localauthorKong, Hong-Jin-
dc.contributor.nonIdAuthorLim, TW-
dc.contributor.nonIdAuthorPark, SH-
dc.contributor.nonIdAuthorLee, KS-
dc.type.journalArticleArticle-
dc.subject.keywordAuthornano-stereolithography process-
dc.subject.keywordAuthor3D micro-curved structures-
dc.subject.keywordAuthortwo-photon polymerization-
dc.subject.keywordAuthormulti-exposure voxel matrix-
dc.subject.keywordPlusPRESSURE-DIFFERENCE TECHNIQUE-
dc.subject.keywordPlusLASER NANOFABRICATION-
dc.subject.keywordPlusPHOTOPOLYMERIZATION-
dc.subject.keywordPlusMICROFABRICATION-
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ME-Journal Papers(저널논문)PH-Journal Papers(저널논문)
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