Floating-patch MEMS antennas on HRS substrate for millimetre-wave applications

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Novel floating-patch micro-electro-mechanical system (MEMS) antennas are proposed for millimetre-wave applications. The floating-patch MEMS antennas are fabricated on a high resistivity silicon (HRS) substrate using surface micromachining technology. Simulation and experimental results for reflection coefficients and radiation patterns are presented.
Publisher
Inst Engineering Technology-Iet
Issue Date
2005-01
Language
English
Article Type
Article
Citation

ELECTRONICS LETTERS, v.41, no.1, pp.5 - 6

ISSN
0013-5194
DOI
10.1049/el:20057307
URI
http://hdl.handle.net/10203/89818
Appears in Collection
EE-Journal Papers(저널논문)
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