제조공정 오차보상용 보정 탄성체를 이용한 고정도 디지털-아날로그 구동기

Abstract

We present a high-accuracy digital-to-analog (DA) actuator using a load spring, specially designed to compensate the output displacement errors caused by fabrication errors. The compensated linear DA actuator is capable to change the slope of input-output modulation line in order to compensate fabrication errors. We design, fabricate, and characterize three different prototypes: one uncompensated design and two compensated designs respectively for a specific value and for a given range of fabrication error. The compensated linear DA actuators show the output displacement errors of -0.20±0.23㎛ and -0.13±0.18㎛ , respectively, reduced by 64.3% and 76.8% of the output displacement error, 0.56±0.20㎛ , produced by the conventional uncompensated linear DA actuator. We experimentally verify the fabrication error compensation capability of the present compensated linear DA actuators, thus demonstrating high-accuracy actuation performance immune to fabrication errors