High performance molecular resists based on beta-cyclodextrin

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Publisher
NATURE PUBLISHING GROUP
Issue Date
2006
Language
English
Article Type
Article
Keywords

WEIGHT ORGANIC RESISTS; NANOMETER LITHOGRAPHY; MICROLITHOGRAPHY; DERIVATIVES

Citation

POLYMER JOURNAL, v.38, no.9, pp.996 - 998

ISSN
0032-3896
DOI
10.1295/polymj.PJ2006015
URI
http://hdl.handle.net/10203/88043
Appears in Collection
CH-Journal Papers(저널논문)
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