A Flexure Guided Planar Scanner for Scanning Probe Microscope; Part1: Design and Analysis of Static and Dynamic Properties
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | dong-yeon lee | ko |
| dc.contributor.author | moo-yeon lee | ko |
| dc.contributor.author | Gweon, Dae-Gab | ko |
| dc.date.accessioned | 2013-03-06T06:26:29Z | - |
| dc.date.available | 2013-03-06T06:26:29Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2005 | - |
| dc.identifier.citation | 한국소음진동공학회논문집, v.15, no.6, pp.667 - 673 | - |
| dc.identifier.issn | 1598-2785 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/86127 | - |
| dc.language | Korean | - |
| dc.publisher | 한국소음진동공학회 | - |
| dc.title | A Flexure Guided Planar Scanner for Scanning Probe Microscope; Part1: Design and Analysis of Static and Dynamic Properties | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 15 | - |
| dc.citation.issue | 6 | - |
| dc.citation.beginningpage | 667 | - |
| dc.citation.endingpage | 673 | - |
| dc.citation.publicationname | 한국소음진동공학회논문집 | - |
| dc.contributor.localauthor | Gweon, Dae-Gab | - |
| dc.contributor.nonIdAuthor | dong-yeon lee | - |
| dc.contributor.nonIdAuthor | moo-yeon lee | - |
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- ME-Journal Papers(저널논문)
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