Volumetric Interferometry UsingVolumetric Interferometry Using Spherical Wave Interference for Three-Dimensional Coordinate Metrology

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We present a new method of volumetric interferometer, which is intended to measure the three-dimensional coordinates of a moving object in a simultaneous way with a single optical setup. The method is based on the principles of phase-measuring interferometry with phase shifting. Two diffraction point sources, which are made of the polished ends of single-mode optical fibers are embedded on the object. Two spherical wavefronts emanate from the diffraction point sources and interfere with each other within the measurement volume. One wavefront is phase-shifted by elongating the corresponding fiber using a PZT extender. A CCD array sensor fixed at the stationary measurement station detects the resulting interference field. The measured phases are then related to the three-dimensional location of the object with a set of non-liner equations of Euclidean distance, from which the complete set of three-dimensional spatial coordinates of the object is determined through rigorous numerical computation based upon the least square error minimization.
Publisher
한국광학회
Issue Date
2001
Language
Korean
Citation

JOURNAL OF THE OPTICAL SOCIETY OF KOREA, v.5, no.4, pp.140 - 145

ISSN
1225-6285
URI
http://hdl.handle.net/10203/85050
Appears in Collection
ME-Journal Papers(저널논문)
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