확장 트와이만-그린 간섭계를 이용한 운동 오차의 실시간 보상Real-time Compensation of Motion Errors Using Extended Twyman-Green Interferometry

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dc.contributor.author배은덕ko
dc.contributor.author오정석ko
dc.contributor.author김승우ko
dc.date.accessioned2013-03-05T02:27:12Z-
dc.date.available2013-03-05T02:27:12Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2003-10-
dc.identifier.citation한국정밀공학회지, v.20, no.10, pp.112 - 119-
dc.identifier.issn1225-9071-
dc.identifier.urihttp://hdl.handle.net/10203/85041-
dc.description.abstractThis paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement.-
dc.languageKorean-
dc.publisher한국정밀공학회-
dc.title확장 트와이만-그린 간섭계를 이용한 운동 오차의 실시간 보상-
dc.title.alternativeReal-time Compensation of Motion Errors Using Extended Twyman-Green Interferometry-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume20-
dc.citation.issue10-
dc.citation.beginningpage112-
dc.citation.endingpage119-
dc.citation.publicationname한국정밀공학회지-
dc.identifier.kciidART000913009-
dc.contributor.localauthor김승우-
dc.contributor.nonIdAuthor배은덕-
dc.contributor.nonIdAuthor오정석-
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