DC Field | Value | Language |
---|---|---|
dc.contributor.author | 배은덕 | ko |
dc.contributor.author | 오정석 | ko |
dc.contributor.author | 김승우 | ko |
dc.date.accessioned | 2013-03-05T02:27:12Z | - |
dc.date.available | 2013-03-05T02:27:12Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-10 | - |
dc.identifier.citation | 한국정밀공학회지, v.20, no.10, pp.112 - 119 | - |
dc.identifier.issn | 1225-9071 | - |
dc.identifier.uri | http://hdl.handle.net/10203/85041 | - |
dc.description.abstract | This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement. | - |
dc.language | Korean | - |
dc.publisher | 한국정밀공학회 | - |
dc.title | 확장 트와이만-그린 간섭계를 이용한 운동 오차의 실시간 보상 | - |
dc.title.alternative | Real-time Compensation of Motion Errors Using Extended Twyman-Green Interferometry | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 20 | - |
dc.citation.issue | 10 | - |
dc.citation.beginningpage | 112 | - |
dc.citation.endingpage | 119 | - |
dc.citation.publicationname | 한국정밀공학회지 | - |
dc.identifier.kciid | ART000913009 | - |
dc.contributor.localauthor | 김승우 | - |
dc.contributor.nonIdAuthor | 배은덕 | - |
dc.contributor.nonIdAuthor | 오정석 | - |
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