확장 트와이만-그린 간섭계를 이용한 운동 오차의 실시간 보상Real-time Compensation of Motion Errors Using Extended Twyman-Green Interferometry

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This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement.
Publisher
한국정밀공학회
Issue Date
2003-10
Language
Korean
Citation

한국정밀공학회지, v.20, no.10, pp.112 - 119

ISSN
1225-9071
URI
http://hdl.handle.net/10203/85041
Appears in Collection
ME-Journal Papers(저널논문)
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