Volumetric phase-measuring interferometer for three-dimensional coordinate metrology

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We present a volumetric interferometer that has been specially designed to improve the measurement accuracy of the three-dimensional coordinate metrology by reducing excessive Abbe offsets. The interferometer is composed of two main parts; one is a three-dimensionally movable target and the other is a stationary two-dimensional array of photo-detectors. The target made of point diffraction sources emanates two spherical wavefronts, of which interference intensity is monitored by the photo-detectors. Applying phase shifting allows the phases of the photo-detectors to be precisely obtained, and the measured phases are fitted to a geometric model of multilateration so as to determine the xyz-location of the target by minimizing least square errors. A prototype built on a CMM demonstrates that the proposed interferometer is capable of measuring the xyz-coordinates of the probe with a volumetric uncertainty of less than 1.0 mum. (C) 2002 Elsevier Science Inc. All rights reserved.
Publisher
ELSEVIER SCIENCE INC
Issue Date
2003
Language
English
Article Type
Article
Keywords

SHIFTING INTERFEROMETRY; ALGORITHM

Citation

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, v.27, no.2, pp.205 - 215

ISSN
0141-6359
DOI
10.1016/S0141-6359(02)00228-3
URI
http://hdl.handle.net/10203/85009
Appears in Collection
ME-Journal Papers(저널논문)
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