Two-way frequency-conversion phase measurement for high-speed and high-resolution heterodyne interferometry

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He-Ne heterodyne laser interferometers are widely used as standard tools for displacement metrology to produce high-resolution measurements. However, such systems use specially designed complex and costly high-speed electronics. In this paper, we present a new unsophisticated method of phase measurement that achieves a resolution of 0.15 nm using simple electronics for a target speed of 2.4 ms(-1). The method adopts a frequency-conversion technique to lower the original beat frequency to 100 kHz by mixing it with a stable reference signal generated from a phase-locked loop. At the same time, to avoid the accompanying unwanted decrease in the maximum measurable speed caused by the lowered beat frequency, a two-way frequency conversion and a special fringe-counting method are combined to perform the required phase unwrapping, using widely available programmable digital gates. This allows velocity measurements up to the limit achievable using the original beat frequency.
Publisher
IOP PUBLISHING LTD
Issue Date
2004-11
Language
English
Article Type
Article
Keywords

DISPLACEMENT; LASER

Citation

MEASUREMENT SCIENCE & TECHNOLOGY, v.15, no.11, pp.2341 - 2348

ISSN
0957-0233
DOI
10.1088/0957-0233/15/11/021
URI
http://hdl.handle.net/10203/84960
Appears in Collection
ME-Journal Papers(저널논문)
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