DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이정아 | ko |
dc.contributor.author | 이승섭 | ko |
dc.contributor.author | 전병희 | ko |
dc.date.accessioned | 2013-03-05T00:37:39Z | - |
dc.date.available | 2013-03-05T00:37:39Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2004-06 | - |
dc.identifier.citation | 소성가공, v.13, no.3, pp.290 - 295 | - |
dc.identifier.issn | 1225-696X | - |
dc.identifier.uri | http://hdl.handle.net/10203/84911 | - |
dc.description.abstract | Mircolens and microlens V-groove are realized using a novel fabrication technology based on the exposure of a resist, usually PMMA, to deep X-rays and subsequent thermal treatment and inclined deep X-ray lithography, respectively. The fabrication technology is very simple and produces microlenses and microlens V-groove with good surface roughness of several nm. The molecular weight and glass transition temperature of PMMA is reduced when it is irradiated with deep X-rays. The microlenses were produced through the effects of volume change, surface tension, and reflow during thermal treatment of irradiated PMMA. Microlenses were produced with diameters ranging from 30 to $1500\mu\textrm{m}$. The surface X-ray mask is also fabricated to realize microlens arrays on PMMA sheet with a large area. The size of the micro V-groove is fabricated in the range of 12~$60\mu\textrm{m}$. | - |
dc.language | Korean | - |
dc.publisher | 한국소성가공학회 | - |
dc.title | 변형 DEEP X-ray를 이용한 마이크로 렌즈 및 V-groove 제작 | - |
dc.title.alternative | Microlens Micro V-groove Fabrication by the Modified LIGA Process | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 13 | - |
dc.citation.issue | 3 | - |
dc.citation.beginningpage | 290 | - |
dc.citation.endingpage | 295 | - |
dc.citation.publicationname | 소성가공 | - |
dc.identifier.kciid | ART001098428 | - |
dc.contributor.localauthor | 이승섭 | - |
dc.contributor.nonIdAuthor | 이정아 | - |
dc.contributor.nonIdAuthor | 전병희 | - |
dc.subject.keywordAuthor | Microlens | - |
dc.subject.keywordAuthor | LIGA | - |
dc.subject.keywordAuthor | Glass Transition Temperature | - |
dc.subject.keywordAuthor | PMMA | - |
dc.subject.keywordAuthor | Micro V-Groove | - |
dc.subject.keywordAuthor | Surface X-Ray Mask | - |
dc.subject.keywordAuthor | Microlens | - |
dc.subject.keywordAuthor | LIGA | - |
dc.subject.keywordAuthor | Glass Transition Temperature | - |
dc.subject.keywordAuthor | PMMA | - |
dc.subject.keywordAuthor | Micro V-Groove | - |
dc.subject.keywordAuthor | Surface X-Ray Mask | - |
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