Fabrication of a high-aspect-ratio nano tip integrated micro cantilever with a ZnO piezoelectric actuator

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This paper reports on the high-aspect-ratio (HAR) nano tip integrated micro cantilever with the ZnO piezoelectric actuator. The cantilever is proposed for the ferroelectric material investigation using the conductive AFM tip, which uses the interaction between the nano tip and the material. The HAR nano tip integrated cantilever is needed to suppress the undesirable effects caused by the interaction between a cantilever and a material. The fabricated device consists of two parts, the cantilever part and the supporting glass part. The HAR nano tip integrated cantilever part is fabricated using the trench refilling process. For the size reduction and the high resonance frequency, the rf-magnetron sputtered ZnO layer is also integrated on the cantilever. The anodic bonded glass supports the cantilever, and the indirect contact between the glass and the electrodes prevents the ZnO breakdown during the bonding process. The HAR nano tip has 6 mum side length, over 18 mum height, which is built on the 85 mum-wide, 300 mum-long, and 1.2 mum-thick cantilever. The aspect ratio of the tip is three or more and the tip radius is less than 15 nm. The simulated spring constant and the resonance frequency are 1.4N/m and 27.81kHz, respectively.
Publisher
TRANS TECH PUBLICATIONS LTD
Issue Date
2004
Language
English
Article Type
Article; Proceedings Paper
Keywords

SCANNING PROBE MICROSCOPE; ATOMIC-FORCE MICROSCOPE; POLARIZED DOMAINS; AFM; STORAGE; FILMS

Citation

ADVANCES IN NONDESTRUCTIVE EVALUATION, PT 1-3 BOOK SERIES: KEY ENGINEERING MATERIALS, v.270-273, pp.1 - 3

ISSN
1013-9826
URI
http://hdl.handle.net/10203/84755
Appears in Collection
ME-Journal Papers(저널논문)
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